bulk specialty gas systems

Features & Benefits:

  • Inert, toxic, hazardous gases; semi-auto or fully automatic PLC-based control with touchscreen interface
  • Single- or double-process panels with optional purge panel
  • Supply from cylinder bundles, y-cylinders, tube trailer or tank truck
  • Automatic crossover with configurable auto-purge and optional deep pigtail purge
  • Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
  • High-flow and ultra-highflow design
  • Optional double isolation for all process valves
  • Optional communication protocols
  • Modular construction to facilitate service and maintenance
  • SEMI-S2 compliant

BSGS Enclosure Features

  • Superior construction – 11-gauge cold-rolled steel, all-welded construction, polyester powder coating for superior corrosion resistance
  • Large windows – Self-closing, self-latching with ¼” safety glass
  • Doors – Self-closing, self-latching with enclosure gasket with full-length hinge for years of trouble-free service
  • Cabinet louvers – Air intake on door bottom and bottom rear of the enclosure evacuates gases through the rear plenum and eliminates dead areas
  • Exhaust sensor – Alarm can initiate chemical shutdown, audible alarm or remote alarm as needed
  • Sprinkler head – U.L. approved
  • Optional rack or stainless steel cabinet designs
  • SEMI-F14 compliant

BSGS Enclosure Specifications

  • Three-cylinder enclosure – 42” W x 23” D x 89” H with dual 6” exhaust
  • Three-cylinder gas rack – 42” W x 23” D x 89” H Optional VMB Accessories
  • Door/window sensors – Provide programmable alarm if door or window is opened
  • Toxic monitor – Monitors enclosure continuously for any sign of toxic leak
  • Fire sensors – Standard rate of rise or optional UV/IR or dual IR sensors
  • Scale platforms for y-cylinders in single- or multiple-cylinder configurations, tube trailer or tank-truck scale system
  • Single- or dual-loop heaters to increase component reliability and responsiveness for liquefied compressed gases under high-flow conditions
  • Source gas cylinder heating blankets for liquefied compressed gases to stabilize vapor pressure under high-flow conditions
  • VMBs for efficient distributions
  • Flow meters for total flow and usage tracking


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