Features & Benefits:
- Gas cabinet or rack mounted for Inert, toxic hazardous gases; semi-auto or fully automatic with a touchscreen interface
- Single-, Dual- and multiple-process panel configurations & engineered to process requirements
- Optional purge panel with purge procedure proven in corrosive applications, such as F2, HF, HCl, and WF6
- Life safety relay logic to override PLC for fire, leak, toxic and facility shutdowns with relay feedback
- SEMI-S2 compliant
Controller Options
- Manual switch for automatic cylinder changeovers
- Semi-auto systems with automatic switchover
- Fully automated systems with purge routines
Panel Options
- Purge panel
- Regulator
- Purifiers
- Pressure switch
- Transmitter
- Process panel
- Manual panels, 3–8 valves
- Automatic panels, 5–8 valves
- Purifiers & filters
- Pressure switches
- Transmitters
- Flow switches
- Test valves
- Pressure switch
- Manual isolation valves
- Emergency shutoff valves
Safety Options
- UV/IR sensor
- Temperature switch
- Leak sensor
- Door interlocks
- Remote shutdown relays
- EMO
- Sprinklers
- Heat
- Cool (Chiller)
For further information contact AGEM for customize requirement.
